How CORIAL Helped FATRI Increase Production Yield and Capacity
The Client FATRI United Testing & Control Technologies Co., LTD, is a leading service provider of chip design and advanced material synthesis for IoT, sensors, and AI. With four branches across China, FATRI provides chips, sensors, computing modules, calibration systems, and advanced materials to companies across the globe....
INSA Rennes selects CORIAL for a 200 mm PECVD tool
On December 2017, CORIAL won a public tender from INSA Rennes for a 200 mm PECVD system. After a successful Internal Acceptance Test in our factory with the customer, the system is now ready for shipment. About INSA Rennes Created in 1966, INSA Rennes is a member of...
IMB-CNM-CSIC selects CORIAL PECVD technology
IMB-CNM-CSIC has ordered a CORIAL 300 mm PECVD system (Corial D350L). About IMB-CNM-CSIC Institute of Microelectronics of Barcelona (IMB-CNM-CSIC) has ordered a 300 mm PECVD system (Corial D350L) for the research and development of advanced Micro/Nano integrated...
Discover our markets
CORIAL tools can be used for many applications, learn more with this infographic Our clients can rely on us to widen their range of possibilities and reduce their process development time, backed by our expertise in process development for specialty semiconductor...
Si DRIE process on conventional ICP-RIE tool
Our Process Team has recently developed a process recipe for deep etch of silicon-based MEMS structures on SoI wafers. Process recipe This new recipe confirms the capability of our Corial 210IL ICP-RIE etch tool to achieve deep Si etching and at the same time to...
