---
title: CORTEX® Process control software | Corial
description: The simplest, most efficient software to develop processes, operate, and maintain CORIAL etch and deposition systems
---

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# CORTEX® Process control software

The simplest, most efficient software to develop processes, operate, and maintain CORIAL systems

[THE SOFTWARE IN BRIEF](https://corial.plasmatherm.com/en/products/cortex-process-control-software#description)  
[KEY BENEFITS](https://corial.plasmatherm.com/en/products/cortex-process-control-software#benefits)[KEY FEATURES](https://corial.plasmatherm.com/en/products/cortex-process-control-software#features)

## CORTEX® process control software in brief

CORTEX®, Advanced Process Control Software offers a seamless, efficient interface for process development, operating, and performing the maintenance routines on all CORIAL systems.

CORTEX® software features a Graphical  User Interface running Windows

## ![Key Benefits](https://corial.plasmatherm.com/hs-fs/hubfs/CORIAL_May_2020/images/Icon-Key-Bebefits.png?width=35&height=35&name=Icon-Key-Bebefits.png)Key benefits

R

#### SIMPLE-TO-USE GRAPHICAL USER INTERFACE (GUI)

R

#### COMMON CONTROL INTERFACE ACROSS RIE, ICP-RIE, DRIE, ICP-CVD AND PECVD PRODUCTS

R

#### SAFE, SECURE OPERATION AND MAINTENANCE

## Key features

![Process edition](https://corial.plasmatherm.com/hubfs/Corial/Process%20edition.png "Process edition")

## Process editing

Quickly create, optimize and customize new process recipes.

Edit, store, use, and duplicate process recipes with CORTEX’s unique user interface.

## Process adjustment

Use CORIAL’s exclusive interactive process control and editing capability to quickly optimize and fine tune your recipes.

Perform diverse actions while simultaneously running processes; e.g., modify any process parameter, toggle ICP power (On / Off), or transition to a different process step.

![Gas flow setup](https://corial.plasmatherm.com/hubfs/Corial/Software/Gas%20flow%20setup.png "Gas flow setup")

![Tool Operation](https://corial.plasmatherm.com/hubfs/Corial/Tool%20Operation.png "Tool Operation")

## Process operation

#### Multiple user access rights

Password-controlled login with different levels of user access.

#### Multistep management

Automatic transition to the next process step, based on signals from endpoint detectors or process timers

#### Real-time process data display

All process parameters, real or virtual (mathematical combination of real process parameters) can be monitored simultaneously in real time during process execution.

#### Process reproducibility

Each process step is tightly controlled and monitored, to ensure reproducibility and optimum performance.

## Process analysis

Continuous system data logging (200 ms) to thoroughly analyze all process parameters and perform fine tuning.

![Process Dev](https://corial.plasmatherm.com/hubfs/Corial/Process%20Dev.png "Process Dev")

![End Point Detection](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/EPD.png "End Point Detection")

## End Point Detection

Reliable and automated End Point Detection (EPD) system results in tighter process control and precise rate determination.

CORIAL EPD utilizes an optional CCD camera and laser interferometry.

Any process parameter can be used for EPD (such as self-bias, RF tuning, throttle valve position, etc.).

## System maintenance

#### Safe system maintenance

Secured maintenance operation is ensured with CORIAL’s pre-defined maintenance routines.

#### Remote access

Remote maintenance via the Internet is available to perform software updates, on-line diagnostics, and process support.

![System maintenance](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/COSMA-remote-access.png "System maintenance")

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