How to Gauge the Reputation of Dry Etch Solution Providers

It's not enough to find a consistent supplier for plasma processing technology, particularly etching tools. When dealing with such a big investment, you'll be relying on this provider as a partner to help you navigate and solve problems as they come along. This is why it's necessary to find a dry etch solution provider with a good reputation. However, it's not always easy to gauge the reputation of these and other companies. ...

How CORIAL Helped FATRI Increase Production Yield and Capacity

The Client FATRI United Testing & Control Technologies Co., LTD, is a leading service provider of chip design and advanced material synthesis for IoT, sensors, and AI. With four branches across China, FATRI provides chips, sensors, computing modules, calibration systems, and advanced materials to companies across the globe....

INSA Rennes selects CORIAL for a 200 mm PECVD tool

On December 2017, CORIAL won a public tender from INSA Rennes for a 200 mm PECVD system. After a successful Internal Acceptance Test in our factory with the customer, the system is now ready for shipment. About INSA Rennes Created in 1966, INSA Rennes is a member of...

IMB-CNM-CSIC selects CORIAL PECVD technology

IMB-CNM-CSIC has ordered a CORIAL 300 mm PECVD system (Corial D350L). About IMB-CNM-CSIC Institute of Microelectronics of Barcelona (IMB-CNM-CSIC) has ordered a 300 mm PECVD system (Corial D350L) for the research and development of advanced Micro/Nano integrated...

Discover our markets

CORIAL tools can be used for many applications, learn more with this infographic Our clients can rely on us to widen their range of possibilities and reduce their process development time, backed by our expertise in process development for specialty semiconductor...

Si DRIE process on conventional ICP-RIE tool

Our Process Team has recently developed a process recipe for deep etch of silicon-based MEMS structures on SoI wafers. Process recipe This new recipe confirms the capability of our Corial 210IL ICP-RIE etch tool to achieve deep Si etching and at the same time to...