grey hands (1)Why we are trusted partners

For more than 30 years we have been providing those in industry and academia with plasma etch and deposition systems.

Our parent company, Plasma-Therm, is a global leader in the space, giving us access to world class resources and insights. With our team expertise and advanced equipment, we are the smart choice.


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Our know-howKnow How

Built on more than 30 years of combined experience and expertise, CORIAL is the technology leader driving innovation in plasma etch and deposition equipment for specialty semiconductor markets.

Advanced Equipment

Advanced Equipment

We invest 15% of our revenues in R&D, in order to provide the most versatile, reliable, and highest-performing etch and deposition systems for specialty semiconductor markets.

We deliver the only control software that broadens the process capabilities of conventional ICP tools to enable time-multiplexed processes such as the Bosch process, and Atomic Layer Etching (ALE).

Team Experties

Team Experties

Our engineers combine a thorough knowledge of plasma physics and chemistry with rigorous experimental design techniques (D.O.E.) to develop our products and processes.

That technical expertise plus our distribution network enables CORIAL to offer a highly flexible suite of products with low cost of ownership.

Extensive Process Library

Extensive Process Library

At CORIAL, we address a range of end-market applications including MEMS, optoelectronics, failure analysis, power devices, advanced packaging, wireless devices and integrated optics.

Our R&D team continuously develops and fine-tunes the etching and deposition processes that will enable our customers to structure the materials of today and tomorrow.

CORIAL in briefbrief


years of customer support

in research institutes, universities,

and fabs

years of customer support


specialty semiconductor markets

served by our process solutions

DMP3367 BD


CORIAL participates in the EU funded BUTTERFLY Project!

What do we do at CORIAL?

Watch this 2-minute video to see for yourself.