Etch Performance: 9 Factors to Consider
Etch Rate Etch rate is the measurable quantity of how fast material is removed from the surface of a wafer and is typically expressed in Å, nm, μm per unit time (e.g. Å/s, nm/min, μm/min). It is usually measured following an etch process by dividing the total thickness change by the time of the etch or by taking several thickness measurements for different etch times and using a “best fit” to the slope. This is done when it is suspected that the etch rate may not be linear with time or that there may be a delay in the onset of etching. Occasionally, it is possible to measure the etch rate in real-time....
Endpoint Basics
How do you know the precise moment when your deposition or etching process is completed? How can you tell, with accuracy, that you've etched to a necessary depth, removed a layer or even deposited to a required thickness? The answer is simple: you use endpoints. Here's an introduction to endpoint technology; methods, comparisons, and considerations....
How Dry Etching and Deposition Tools Drive the Green Revolution
Driven by concerns over hydrocarbon fuel resources, costs, and environmental impact, energy has moved into the spotlight. New energy sources, and conserving energy, impacts nearly every aspect of our power-dependent lives....
How to convert a HDP-CVD system to an ICP-RIE
HDP-CVD — a chemical vapor deposition tool that utilizes an Inductively Coupled Plasma (ICP) source — is an increasingly popular plasma deposition tool. HDP-CVD (also known as ICP-CVD) is capable of generating higher plasma density and quality films at lower deposition temperatures than traditional PECVD machines....
How to Gauge the Reputation of Dry Etch Solution Providers
It's not enough to find a consistent supplier for plasma processing technology, particularly etching tools. When dealing with such a big investment, you'll be relying on this provider as a partner to help you navigate and solve problems as they come along. This is why it's necessary to find a dry etch solution provider with a good reputation. However, it's not always easy to gauge the reputation of these and other companies....
