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ICP etch process for ultra-low-K delayering for 20 nm technology node
Feb 28, 2017
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Plasma Processing Technology
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ILD deprocessing on wafer
Feb 28, 2017
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Plasma Processing Technology
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Self planarized SiOF film deposition process for step coverage
Feb 28, 2017
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Plasma Processing Technology
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Low temperature nitride film deposition
Feb 28, 2017
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Plasma Processing Technology
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InP mesa etch
Feb 28, 2017
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Plasma Processing Technology
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RIE etching process for Chrome (Cr) for binary mask repair application
Feb 28, 2017
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Plasma Processing Technology
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Learn More +
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