--- title: The Butterfly Project description: The BUTTERFLY project image: https://corial.plasmatherm.com/hubfs/CORIAL%20Logo%20Blog.png --- [![CORIAL-PT-LOGO-2021 v6](https://corial.plasmatherm.com/hs-fs/hubfs/CORIAL-PT-LOGO-2021%20v6.png?width=3397&height=1147&name=CORIAL-PT-LOGO-2021%20v6.png "CORIAL-PT-LOGO-2021 v6")](https://corial.plasmatherm.com/en) Menu - [ABOUT](https://corial.plasmatherm.com/en/about-corial) - Blank wrapper - [Plasma-Therm Website](http://plasmatherm.com/) - [TECHNOLOGIES](https://corial.plasmatherm.com/en/technologies/plasma-technologies) - blank - blank-inner - Plasma etch - blank-inner - [RIE](https://corial.plasmatherm.com/en/technologies/reactive-ion-etching-rie) - [ICP-RIE](https://corial.plasmatherm.com/en/technologies/icp-rie-inductively-coupled-plasma-reactive-ion-etching) - [DRIE](https://corial.plasmatherm.com/en/technologies/drie-deep-reactive-ion-etching) - blank - blank-inner - blank-inner - [ICP-CVD](https://corial.plasmatherm.com/en/technologies/icp-cvd-inductively-coupled-plasma-chemical-vapor-deposition/) - [PECVD](https://corial.plasmatherm.com/en/technologies/pecvd-plasma-enhanced-chemical-vapor-deposition) - blank - blank-inner - blank-inner - [ALE](https://corial.plasmatherm.com/en/technologies/ale-atomic-layer-etching) - [ALD](https://corial.plasmatherm.com/en/technologies/ald-atomic-layer-deposition) - [BLOGS](https://corial.plasmatherm.com/en/blog) - Blank wrapper - [CORIAL Blog](https://corial.plasmatherm.com/en/blog) - [Plasma-Therm Blog](https://blog.plasmatherm.com) - [CONTACT US](https://corial.plasmatherm.com/en/contact-us) - Blank wrapper # The Butterfly Project Jun 25, 2020 | [Company News](https://corial.plasmatherm.com/en/blog/tag/company-news) [![BUTTERFLY project graphic\_800x576 (1)](https://corial.plasmatherm.com/hubfs/BUTTERFLY%20project%20graphic_800x576%20(1).png "The Butterfly Project")](https://corial.plasmatherm.com/hubfs/BUTTERFLY%20project%20graphic_800x576%20(1).png) ## The Butterfly Project # The BUTTERFLY project: Thanks to previous work, notably carried out within the framework of the IAN Bright project, Soitec has developed a disruptive substrate for the growth of LEDs, called InGaNOS (InGaN on sapphire on islands of 100µm to 1mm for LED-based lighting applications blue). The growth of preliminary structures produced by CEA-Leti has demonstrated the direct emission from blue to red on InGaNOS. The BUTTERFLY project aims to continue the development of this substrate and LED technological bricks in order to produce a series of LED and micro-LED demonstrators using a breakthrough approach. The objective is to demonstrate the proof of concept of red micro-LEDs based on the InGaNOS substrate and to produce first demonstrators sufficiently relevant to convince customers. The partnership brings together Soitec, a world leader in the design and production of innovative semiconductor materials, Corial, a supplier of micro-technologies, and the Optics and Photonics department of CEA-Leti, one of the main world research centers in the field of optoelectronics. Within this project CORIAL develops an optimized etching equipment allowing manufacturing of industrial solutions for producing one of the first technological bricks of micro-LEDs enabling it to address this emerging market. Partners of this project: [![CAELeti](https://corial.plasmatherm.com/hs-fs/hubfs/Other%20company%20logos/CAELeti.png?width=148&name=CAELeti.png)](http://www.leti-cea.com/cea-tech/leti/english)[![Soitec (original)](https://corial.plasmatherm.com/hs-fs/hubfs/Other%20company%20logos/Soitec%20(original).png?width=239&name=Soitec%20(original).png)](http://www.soitec.com)   The project has been approved by Minalogic and BPI: [![Minalogic](https://corial.plasmatherm.com/hs-fs/hubfs/Other%20company%20logos/Minalogic.png?width=75&name=Minalogic.png)](https://www.minalogic.com)[![bpifrance-logo-1](https://corial.plasmatherm.com/hs-fs/hubfs/Other%20company%20logos/bpifrance-logo-1.png?width=507&name=bpifrance-logo-1.png)](http://www.bpifrance.com)   **In association with:**  ![Logo\_LEurope\_sengage\_FEDER\_2017\_Quadri (3)](https://corial.plasmatherm.com/hs-fs/hubfs/Other%20company%20logos/Logo_LEurope_sengage_FEDER_2017_Quadri%20(3).jpg?width=518&name=Logo_LEurope_sengage_FEDER_2017_Quadri%20(3).jpg)[![LaRegionAuvergne](https://corial.plasmatherm.com/hs-fs/hubfs/Other%20company%20logos/LaRegion.png?width=283&name=LaRegion.png)](https://www.auvergnerhonealpes.fr/) [![eBook: Purchase Order to Final Acceptance Test](https://no-cache.hubspot.com/cta/default/7547247/612cafc7-8ab8-42cd-a452-c539a115a8e4.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/612cafc7-8ab8-42cd-a452-c539a115a8e4) - - - [mailto:?subject=https://corial.plasmatherm.com/en/blog/butterfly-project](mailto:?subject=https://corial.plasmatherm.com/en/blog/butterfly-project) ### Subscribe Here ### Recent Posts ### Post Tags - [Plasma Processing Technology (28)](https://corial.plasmatherm.com/en/blog/tag/plasma-processing-technology) - [Company News (16)](https://corial.plasmatherm.com/en/blog/tag/company-news) - [Etching Tools (14)](https://corial.plasmatherm.com/en/blog/tag/etching-tools) - [Featured Solutions (14)](https://corial.plasmatherm.com/en/blog/tag/featured-solutions) - [Deposition Tools (10)](https://corial.plasmatherm.com/en/blog/tag/deposition-tools) - [CORIAL products (3)](https://corial.plasmatherm.com/en/blog/tag/corial-products) - [Employee Spotlight (3)](https://corial.plasmatherm.com/en/blog/tag/employee-spotlight) - [Research and Development (3)](https://corial.plasmatherm.com/en/blog/tag/research-and-development) - [Events (2)](https://corial.plasmatherm.com/en/blog/tag/events) - [Customer Spotlight (1)](https://corial.plasmatherm.com/en/blog/tag/customer-spotlight) - [Wafer Singulation (1)](https://corial.plasmatherm.com/en/blog/tag/wafer-singulation) see all [![quote\>newsletter](https://no-cache.hubspot.com/cta/default/7547247/2be88541-9961-4fe9-b07c-314e5e653888.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/2be88541-9961-4fe9-b07c-314e5e653888) [![quote](https://no-cache.hubspot.com/cta/default/7547247/0ee740a6-9189-46b7-b114-011ce7f398c6.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/0ee740a6-9189-46b7-b114-011ce7f398c6) [![contact](https://no-cache.hubspot.com/cta/default/7547247/d30e55cc-6021-44b7-a53e-75407de513de.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/d30e55cc-6021-44b7-a53e-75407de513de) ![Corial](https://corial.plasmatherm.com/hubfs/raw_assets/public/CORIAL_May_2020/images/logo-white-1.png) - [ABOUT](https://corial.plasmatherm.com/en/about-corial) - [TECHNOLOGIES](https://corial.plasmatherm.com/en/technologies/plasma-technologies) - [BLOGS](https://corial.plasmatherm.com/en/blog) - [CONTACT US](https://corial.plasmatherm.com/en/contact-us) #### Follow us on - [LinkedIn](https://fr.linkedin.com/company/corial) - [Twitter](https://twitter.com/corial_company) - [Facebook](https://www.facebook.com/CORIALaplasmathermcompany) Copyright CORIAL 2023 – All rights reserved | [Legal information](https://corial.plasmatherm.com/en/about-corial/en/legal-information/) | [Credits](https://corial.plasmatherm.com/en/about-corial/en/credits/) - [![contact](https://no-cache.hubspot.com/cta/default/7547247/07a71f9a-0aeb-4a95-86c9-4a2dfd7285c2.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/07a71f9a-0aeb-4a95-86c9-4a2dfd7285c2)