---
title: Plasma Enhanced Chemical Vapor Deposition (PECVD) | Corial
description: All you need to know about Plasma Enhanced Chemical Vapor Deposition (PECVD), the hybrid CVD process to deposite high quality thin films at low temperature
---

[![CORIAL-PT-LOGO-2021 v6](https://corial.plasmatherm.com/hs-fs/hubfs/CORIAL-PT-LOGO-2021%20v6.png?width=3397&height=1147&name=CORIAL-PT-LOGO-2021%20v6.png "CORIAL-PT-LOGO-2021 v6")](https://corial.plasmatherm.com/en?hsLang=en) 

Menu

- [ABOUT](https://corial.plasmatherm.com/en/about-corial) 
    - Blank wrapper 
          - [History](https://corial.plasmatherm.com/en/our-story)
          - [Partnerships & Awards](https://corial.plasmatherm.com/en/about-corial/partnership)
          - [Careers](https://corial.plasmatherm.com/en/careers)
          - [A Plasma-Therm Company](https://corial.plasmatherm.com/en/a-plasma-therm-company)
          - [Plasma-Therm Website](http://plasmatherm.com/)
- [RESOURCES](https://corial.plasmatherm.com/resources)
- [MARKETS](https://corial.plasmatherm.com/en/markets/specialty-semiconductor) 
    - Blank wrapper 
          - [Microelectromechanical Systems (MEMS)](https://corial.plasmatherm.com/en/markets/microelectromechanical-systems-mems)
          - [Failure Analysis](https://corial.plasmatherm.com/en/markets/failure-analysis-semiconductor)
          - [Optoelectronics](https://corial.plasmatherm.com/en/markets/optoelectronics)
    - Blank wrapper 
          - [Compound Semiconductor Power Devices](https://corial.plasmatherm.com/en/markets/compound-semiconductor-power-devices)
          - [Advanced Packaging](https://corial.plasmatherm.com/en/markets/advanced-packaging)
          - [Wireless Communication](https://corial.plasmatherm.com/en/markets/wireless-communication)
    - Blank wrapper 
          - [Photomask](https://corial.plasmatherm.com/en/markets/photomask-mask-repair)
          - [Integrated Optics](https://corial.plasmatherm.com/en/markets/integrated-optics)
          - [R&D](https://corial.plasmatherm.com/en/markets/research-development)
- [TECHNOLOGIES](https://corial.plasmatherm.com/en/technologies/plasma-technologies) 
    - blank 
          - blank-inner 
                  - Plasma etch
          - blank-inner 
                  - [Plasma etch](https://corial.plasmatherm.com/en/technologies/plasma-etching-process)
                  - [RIE](https://corial.plasmatherm.com/en/technologies/reactive-ion-etching-rie)
                  - [ICP-RIE](https://corial.plasmatherm.com/en/technologies/icp-rie-inductively-coupled-plasma-reactive-ion-etching)
                  - [DRIE](https://corial.plasmatherm.com/en/technologies/drie-deep-reactive-ion-etching)
    - blank 
          - blank-inner 
                  - [Plasma enhanced deposition](https://corial.plasmatherm.com/en/technologies/plasma-deposition)
          - blank-inner 
                  - [Plasma enhanced deposition](https://corial.plasmatherm.com/en/technologies/plasma-deposition)
                  - [ICP-CVD](https://corial.plasmatherm.com/en/technologies/icp-cvd-inductively-coupled-plasma-chemical-vapor-deposition/)
                  - [PECVD](https://corial.plasmatherm.com/en/technologies/pecvd-plasma-enhanced-chemical-vapor-deposition)
    - blank 
          - blank-inner 
                  - [Atomic layer processing](https://corial.plasmatherm.com/en/technologies/atomic-layer-processing-alp)
          - blank-inner 
                  - [Atomic layer processing](https://corial.plasmatherm.com/en/technologies/atomic-layer-processing-alp)
                  - [ALE](https://corial.plasmatherm.com/en/technologies/ale-atomic-layer-etching)
                  - [ALD](https://corial.plasmatherm.com/en/technologies/ald-atomic-layer-deposition)
- [PRODUCTS](https://corial.plasmatherm.com/en/products/etching-tools-and-deposition-tools) 
    - blank 
          - hardware
          - blank-inner 
                  - first-wrapper 
                            - left 
                                        - [Shuttleline® 200](https://corial.plasmatherm.com/en/products/shuttline-200)
                                        - [Shuttleline® 300](https://corial.plasmatherm.com/en/products/corial-300-series-etching-deposition-tools-for-production-environment-0)
                                        - [Shuttleline® 500](https://corial.plasmatherm.com/en/products/corial-500)
                            - mid 
                                        - [Takachi](https://corial.plasmatherm.com/products-takachi)
                                        - [Kayen](https://corial.plasmatherm.com/products-kayen)
                                        - [Vision](https://corial.plasmatherm.com/products-vision)
                            - right
    - blank 
          - Software
          - blank 
                  - first 
                            - CORTEX®
                            - links-wrapper 
                                        - [CORTEX®](https://corial.plasmatherm.com/en/products/cortex-process-control-software)
                                        - Process control software
                  - second 
                            - CORTEX®
                            - links-wrapper 
                                        - [CORTEX® Pulse](https://corial.plasmatherm.com/en/products/cosma-pulse-control-software-for-time-multiplexed-processes-0)
                                        - Control software for time multiplexed processes
                  - third 
                            - GLANCE™
                            - links-wrapper 
                                        - [GLANCE™](https://corial.plasmatherm.com/en/products/cosma-rs-reprocessing-software)
                                        - Reprocessing Software
- [SERVICES](https://corial.plasmatherm.com/en/services)
- [BLOGS](https://corial.plasmatherm.com/en/blog) 
    - Blank wrapper 
          - [CORIAL Blog](https://corial.plasmatherm.com/en/blog)
          - [Plasma-Therm Blog](https://blog.plasmatherm.com)
- [CONTACT US](https://corial.plasmatherm.com/en/contact-us) 
    - Blank wrapper 
          - [International Network](https://corial.plasmatherm.com/en/international-network)

# Plasma Enhanced Chemical Vapor Deposition (PECVD)

Superior film density and purity

Plasma Enhanced Chemical Vapor Deposition (PECVD) is a hybrid CVD process used to deposit thin films, where plasma energy, rather than only thermal energy, drives the reactions between excited species and the substrate. This deposition technology is applicable when it is necessary to maintain low wafer temperatures while achieving desired film properties.

 

![PECVD technology](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/pecvd-plasma-enhanced-CVD-for-thin-film-deposition.png "PECVD technology")

## PECVD technology

Plasma enhanced CVD uses RF energy at 13.56 MHz to generate, ignite, and sustain the glow discharge (plasma) between two parallel electrodes. A precursor gas mixture is introduced in the reactor and plasma is used to create reactive and energetic species by collision.

The reactive species diffuse through the sheath to adsorb on and interact with the substrate surface, and a layer of material forms on the substrate surface.

Reaction byproducts are then pumped away by the pumping system, typically comprised of a turbomolecular pump and a dry roughing pump.

## PECVD equipment

PECVD systems have a very strong position in the semiconductor industry because of their capabilities to deposit a large variety of thin films.

Featuring films with tight control of mechanical properties (stress), with the use of a single RF power source, CORIAL’s PECVD tools are easy to use and offer high process reliability.

Our proprietary reactor design is key to ensuring minimum impurity levels in deposited films. Uniform gas distribution and temperature profiles result in highly uniform film properties and thickness across the substrate surface.

![PECVD Equipment](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/Corial-D250-1.jpg "PECVD Equipment")

![PECVD processes](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/PECVD-Superlattice-PWP-ST.jpg "PECVD processes")

## PECVD processes

PECVD technology offers many advantages for depositing thin films:

- Substrate is maintained at low temperature
- Good step coverage
- Highly uniform film deposition
- Excellent control of material properties (refractive index, stress, hardness, etc.)

Films typically deposited by PECVD include silicon oxide, silicon dioxide, silicon nitride, silicon carbide, diamond-like carbon, poly-silicon, and amorphous silicon.

These films are used in the semiconductor industry for isolation of conductive layers, surface passivation, and device encapsulation. Other applications include anti-reflective layer in optics, and dopants deposition.

#### ![process](https://corial.plasmatherm.com/hs-fs/hubfs/CORIAL_May_2020/images/Icon-Product.png?width=35&name=Icon-Product.png)Products

## Corial 200 Series PECVD Systems

![Corial D250](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/Corial-D250-vue-DIM-DRT-sans-Hab.png "Corial D250")

### Corial D250

- PECVD system for R&D and low volume production
- *In-situ* plasma cleaning
- High quality SiO2, Si3N4, SiOCH, SiOF, SiC and aSi-H film deposition

[Learn more](https://corial.plasmatherm.com/en/products/corial-d250-pecvd-deposition-tool?hsLang=en)

![Corial D250L](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/Corial-D250L-vue-DIM-DRT-sans-Hab.png "Corial D250L")

### Corial D250L

- High throughput (load-lock configuration)
- High system uptime with *in-situ* plasma cleaning
- High quality SiO2, Si3N4, SiOCH, SiOF, SiC and aSi-H films

[Learn more](https://corial.plasmatherm.com/en/products/corial-d250l-pecvd-deposition-tool?hsLang=en)

---

## Corial 300 Series PECVD Systems

![Corial D350](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/Corial-D350-vue-DIM-DRT-sans-Hab.png "Corial D350")

### Corial D350

- PECVD deposition system for 24/7 production environment
- Manual loading for up to 300 mm wafers
- High quality SiO2, Si3N4, SiOCH, SiOF, SiC and aSi-H films

[Learn more](https://corial.plasmatherm.com/en/products/corial-d350-pecvd-deposition-tool?hsLang=en)

![Corial D350L](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/Corial-D350L-vue-DIM-DRT-sans-Hab.png "Corial D350L")

### Corial D350L

- PECVD deposition system for 24/7 production environment
- Rapid loading/unloading with load-lock
- High quality SiO2, Si3N4, SiOCH, SiOF, SiC and aSi-H films

[Learn more](https://corial.plasmatherm.com/en/products/corial-d350l-pecvd-deposition-tool?hsLang=en)

---

## Corial 500 Series PECVD Systems

![Corial-D500-vue-DIM-DRT-sans-Hab](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/Corial-D500-vue-DIM-DRT-sans-Hab.png "Corial-D500-vue-DIM-DRT-sans-Hab")

### Corial D500

- Very large area PECVD deposition system
- Flexibility and high throughput with batch loading capability of 104x2’, 25x4’’, 9 x 6’’, or plates up to 500 mm x 500 mm

[Learn more](https://corial.plasmatherm.com/en/products/corial-d500-pecvd-deposition-tool?hsLang=en)

[![quote>newsletter](https://no-cache.hubspot.com/cta/default/7547247/2be88541-9961-4fe9-b07c-314e5e653888.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/2be88541-9961-4fe9-b07c-314e5e653888)

[![quote](https://no-cache.hubspot.com/cta/default/7547247/0ee740a6-9189-46b7-b114-011ce7f398c6.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/0ee740a6-9189-46b7-b114-011ce7f398c6)

[![contact](https://no-cache.hubspot.com/cta/default/7547247/d30e55cc-6021-44b7-a53e-75407de513de.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/d30e55cc-6021-44b7-a53e-75407de513de)

<https://corial.plasmatherm.com/en/technologies/pecvd-plasma-enhanced-chemical-vapor-deposition#top>

![Corial](https://corial.plasmatherm.com/hubfs/raw_assets/public/CORIAL_May_2020/images/logo-white-1.png)

- [ABOUT](https://corial.plasmatherm.com/en/about-corial)
- [RESOURCES](https://corial.plasmatherm.com/resources)
- [MARKETS](https://corial.plasmatherm.com/en/markets/specialty-semiconductor)
- [TECHNOLOGIES](https://corial.plasmatherm.com/en/technologies/plasma-technologies)
- [PRODUCTS](https://corial.plasmatherm.com/en/products/etching-tools-and-deposition-tools)
- [SERVICES](https://corial.plasmatherm.com/en/services)
- [BLOGS](https://corial.plasmatherm.com/en/blog)
- [CONTACT US](https://corial.plasmatherm.com/en/contact-us)

#### Follow us on

- [LinkedIn](https://fr.linkedin.com/company/corial)
- [Twitter](https://twitter.com/corial_company)
- [Facebook](https://www.facebook.com/CORIALaplasmathermcompany)

Copyright CORIAL 2023 – All rights reserved | [Legal information](https://corial.plasmatherm.com/en/about-corial/en/legal-information/?hsLang=en) | [Credits](https://corial.plasmatherm.com/en/about-corial/en/credits/?hsLang=en)

- [![contact](https://no-cache.hubspot.com/cta/default/7547247/07a71f9a-0aeb-4a95-86c9-4a2dfd7285c2.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/07a71f9a-0aeb-4a95-86c9-4a2dfd7285c2)

[![real time web analytics](https://c.statcounter.com/12554016/0/c7d47b53/1/)](https://statcounter.com/)