CORTEX®, Advanced Process Control Software offers a seamless, efficient interface for process development, operating, and performing the maintenance routines on all CORIAL systems.
CORTEX® software features a Graphical User Interface running Windows
Key benefits
R
SIMPLE-TO-USE GRAPHICAL USER INTERFACE (GUI)
R
COMMON CONTROL INTERFACE ACROSS RIE, ICP-RIE, DRIE, ICP-CVD AND PECVD PRODUCTS
R
SAFE, SECURE OPERATION AND MAINTENANCE
Key features
Process editing
Quickly create, optimize and customize new process recipes.
Edit, store, use, and duplicate process recipes with CORTEX’s unique user interface.
Process adjustment
Use CORIAL’s exclusive interactive process control and editing capability to quickly optimize and fine tune your recipes.
Perform diverse actions while simultaneously running processes; e.g., modify any process parameter, toggle ICP power (On / Off), or transition to a different process step.
Process operation
Multiple user access rights
Password-controlled login with different levels of user access.
Multistep management
Automatic transition to the next process step, based on signals from endpoint detectors or process timers
Real-time process data display
All process parameters, real or virtual (mathematical combination of real process parameters) can be monitored simultaneously in real time during process execution.
Process reproducibility
Each process step is tightly controlled and monitored, to ensure reproducibility and optimum performance.
Process analysis
Continuous system data logging (200 ms) to thoroughly analyze all process parameters and perform fine tuning.
End Point Detection
Reliable and automated End Point Detection (EPD) system results in tighter process control and precise rate determination.
CORIAL EPD utilizes an optional CCD camera and laser interferometry.
Any process parameter can be used for EPD (such as self-bias, RF tuning, throttle valve position, etc.).
System maintenance
Safe system maintenance
Secured maintenance operation is ensured with CORIAL’s pre-defined maintenance routines.
Remote access
Remote maintenance via the Internet is available to perform software updates, on-line diagnostics, and process support.
Key benefits
