---
title: "Whitepaper Plasma Etching: Comparing PE, RIE and ICP-RIE"
description: "White paper:  Plasma Etching: Comparing PE, RIE, and ICP-RIE"
image: https://corial.plasmatherm.com/hubfs/plama%20therm%20whitepaper.jpg
---

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# **WHITE PAPER:** **Plasma Etching: Comparing PE, RIE, and ICP-RIE**

![Plasma Etching: Comparing PE, RIE, and ICP-RIE](https://corial.plasmatherm.com/hubfs/Screen%20Shot%202020-12-04%20at%201.00.38%20PM.png "Plasma Etching: Comparing PE, RIE, and ICP-RIE")

## Plasma Etching: Comparing PE, RIE, and ICP-RIE

This white paper presents an overview and comparison of common plasma etching techniques used in semiconductor and MEMS technologies. Following a short review of wet etching versus dry etching, the basics of plasma generation and fundamental etching mechanisms are presented. Learn more  about:

- Background
- Plasma etching system configurations
- Comparisons and advantages

**Fill out the form to get your copy!  ➡️➡️➡️**

# **DOWNLOAD WHITE PAPER:**

<https://corial.plasmatherm.com/whitepaper-plasma-etching-comparing-pe-rie-and-icp-rie#top>

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