---
title: Whitepaper Deposition PECVD, HDPCVD, LPCVD
description: "White paper: Comparing Chemical Vapor Deposition Systems: LPCVD vs. PECVD vs. HDPCVD"
image: https://corial.plasmatherm.com/hubfs/CVD%20wafer-%20Featured%20Image.jpeg
---

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# **WHITE PAPER**

## **Comparing Chemical Vapor Deposition Systems: LPCVD vs. PECVD vs. HDPCVD**

![CVD wafer](https://corial.plasmatherm.com/hubfs/CVD%20wafer.jpg "CVD wafer")

## Comparing Chemical Vapor Deposition Systems: LPCVD vs. PECVD vs. HDPCVD

Chemical Vapor Deposition (CVD) technology is the key to many semiconductor and MEMS technologies. However, confusion abounds when it comes to differentiating between the different types of CVD from low density (LDCVD) and plasma-enhanced (PECVD) to high density (HDPCVD):

 

- Is HDPCVD just PECVD at a lower temperature?.
- Is HDPCVD just PECVD with wafer bias?
- What are the advantages and disadvantages of each?
- From deposition rates to flow regimes, get the specifics on these three important forms of CVD 

# **DOWNLOAD WHITE PAPER:**

[![CORAIL FATRI Case study social image](https://corial.plasmatherm.com/hubfs/CORAIL%20FATRI%20Case%20study%20social%20image.png "CORAIL FATRI Case study social image")](https://corial.plasmatherm.com/en/blog?hsLang=en)

## **[How CORIAL Helped FATRI Increase Production Yield and Capacity](https://corial.plasmatherm.com/en/blog/how-corial-helped-fatri?hsLang=en)**

The Client FATRI United Testing & Control Technologies Co., LTD, is a leading service provider of chip design and advanced material synthesis... [Read More](https://corial.plasmatherm.com/en/blog/how-corial-helped-fatri?hsLang=en)

[![BUTTERFLY project graphic_800x576 (1)](https://corial.plasmatherm.com/hubfs/Blog%20Images/BUTTERFLY%20project%20graphic_800x576%20(1).png "BUTTERFLY project graphic_800x576 (1)")](https://corial.plasmatherm.com/en/blog/butterfly-project?hsLang=en)

### **The Butterfly Project**

Thanks to previous work, notably carried out within the framework of the IAN Bright project, Soitec has developed a disruptive substrate...[Read More](https://corial.plasmatherm.com/en/blog/butterfly-project?hsLang=en)

[![8 Top Universities with Plasma Processing Technology](https://corial.plasmatherm.com/hubfs/Blog%20Images/8%20Top%20Universities%20with%20Plasma%20Processing%20Technology.jpg "8 Top Universities with Plasma Processing Technology")](https://corial.plasmatherm.com/en/blog/8-top-universities-with-plasma-processing-technology?hsLang=en)

# **8 Top Universities with Plasma Processing Technology**

From Cambridge to Hong Kong to Harvard, here are how universities are leveraging Plasma-Therm quality...[Read More](https://corial.plasmatherm.com/en/blog/8-top-universities-with-plasma-processing-technology?hsLang=en)

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