Comparing Chemical Vapor Deposition Systems: LPCVD vs. PECVD vs. HDPCVD
Chemical Vapor Deposition (CVD) technology is the key to many semiconductor and MEMS technologies. However, confusion abounds when it comes to differentiating between the different types of CVD from low density (LDCVD) and plasma-enhanced (PECVD) to high density (HDPCVD):
- Is HDPCVD just PECVD at a lower temperature?.
- Is HDPCVD just PECVD with wafer bias?
- What are the advantages and disadvantages of each?
- From deposition rates to flow regimes, get the specifics on these three important forms of CVD
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