---
title: ILD deprocessing on wafer
description: ILD deprocessing on wafer | Corial
---

[Blog | CORIAL](https://corial.plasmatherm.com/en/blog)

# [ILD deprocessing on wafer](https://corial.plasmatherm.com/en/blog/ild-deprocessing-on-wafer)

 Written by [Corial](https://corial.plasmatherm.com/en/blog/author/corial) | February 28, 2017 at 1:35 PM

## Typical performance

 

- SiO2 etching
- Etch rate 140 nm/min
- Selectivity vs. metal > 50:1

[View full post](https://corial.plasmatherm.com/en/blog/ild-deprocessing-on-wafer)

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