--- title: Expert in Plasma Process Technology | Corial description: Find out how we drive innovation in plasma-processing technologies for specialty semiconductor markets --- [![CORIAL-PT-LOGO-2021 v6](https://corial.plasmatherm.com/hs-fs/hubfs/CORIAL-PT-LOGO-2021%20v6.png?width=3397&height=1147&name=CORIAL-PT-LOGO-2021%20v6.png "CORIAL-PT-LOGO-2021 v6")](https://corial.plasmatherm.com/en?hsLang=en) Menu - [ABOUT](https://corial.plasmatherm.com/en/about-corial) - Blank wrapper - [History](https://corial.plasmatherm.com/en/our-story) - [Partnerships & Awards](https://corial.plasmatherm.com/en/about-corial/partnership) - [Careers](https://corial.plasmatherm.com/en/careers) - [A Plasma-Therm Company](https://corial.plasmatherm.com/en/a-plasma-therm-company) - [Plasma-Therm Website](http://plasmatherm.com/) - [RESOURCES](https://corial.plasmatherm.com/resources) - [MARKETS](https://corial.plasmatherm.com/en/markets/specialty-semiconductor) - Blank wrapper - [Microelectromechanical Systems (MEMS)](https://corial.plasmatherm.com/en/markets/microelectromechanical-systems-mems) - [Failure Analysis](https://corial.plasmatherm.com/en/markets/failure-analysis-semiconductor) - [Optoelectronics](https://corial.plasmatherm.com/en/markets/optoelectronics) - Blank wrapper - [Compound Semiconductor Power Devices](https://corial.plasmatherm.com/en/markets/compound-semiconductor-power-devices) - [Advanced Packaging](https://corial.plasmatherm.com/en/markets/advanced-packaging) - [Wireless Communication](https://corial.plasmatherm.com/en/markets/wireless-communication) - Blank wrapper - [Photomask](https://corial.plasmatherm.com/en/markets/photomask-mask-repair) - [Integrated Optics](https://corial.plasmatherm.com/en/markets/integrated-optics) - [R&D](https://corial.plasmatherm.com/en/markets/research-development) - [TECHNOLOGIES](https://corial.plasmatherm.com/en/technologies/plasma-technologies) - blank - blank-inner - Plasma etch - blank-inner - [Plasma etch](https://corial.plasmatherm.com/en/technologies/plasma-etching-process) - [RIE](https://corial.plasmatherm.com/en/technologies/reactive-ion-etching-rie) - [ICP-RIE](https://corial.plasmatherm.com/en/technologies/icp-rie-inductively-coupled-plasma-reactive-ion-etching) - [DRIE](https://corial.plasmatherm.com/en/technologies/drie-deep-reactive-ion-etching) - blank - blank-inner - [Plasma enhanced deposition](https://corial.plasmatherm.com/en/technologies/plasma-deposition) - blank-inner - [Plasma enhanced deposition](https://corial.plasmatherm.com/en/technologies/plasma-deposition) - [ICP-CVD](https://corial.plasmatherm.com/en/technologies/icp-cvd-inductively-coupled-plasma-chemical-vapor-deposition/) - [PECVD](https://corial.plasmatherm.com/en/technologies/pecvd-plasma-enhanced-chemical-vapor-deposition) - blank - blank-inner - [Atomic layer processing](https://corial.plasmatherm.com/en/technologies/atomic-layer-processing-alp) - blank-inner - [Atomic layer processing](https://corial.plasmatherm.com/en/technologies/atomic-layer-processing-alp) - [ALE](https://corial.plasmatherm.com/en/technologies/ale-atomic-layer-etching) - [ALD](https://corial.plasmatherm.com/en/technologies/ald-atomic-layer-deposition) - [PRODUCTS](https://corial.plasmatherm.com/en/products/etching-tools-and-deposition-tools) - blank - hardware - blank-inner - first-wrapper - left - [Shuttleline® 200](https://corial.plasmatherm.com/en/products/shuttline-200) - [Shuttleline® 300](https://corial.plasmatherm.com/en/products/corial-300-series-etching-deposition-tools-for-production-environment-0) - [Shuttleline® 500](https://corial.plasmatherm.com/en/products/corial-500) - mid - [Takachi](https://corial.plasmatherm.com/products-takachi) - [Kayen](https://corial.plasmatherm.com/products-kayen) - [Vision](https://corial.plasmatherm.com/products-vision) - right - blank - Software - blank - first - CORTEX® - links-wrapper - [CORTEX®](https://corial.plasmatherm.com/en/products/cortex-process-control-software) - Process control software - second - CORTEX® - links-wrapper - [CORTEX® Pulse](https://corial.plasmatherm.com/en/products/cosma-pulse-control-software-for-time-multiplexed-processes-0) - Control software for time multiplexed processes - third - GLANCE™ - links-wrapper - [GLANCE™](https://corial.plasmatherm.com/en/products/cosma-rs-reprocessing-software) - Reprocessing Software - [SERVICES](https://corial.plasmatherm.com/en/services) - [BLOGS](https://corial.plasmatherm.com/en/blog) - Blank wrapper - [CORIAL Blog](https://corial.plasmatherm.com/en/blog) - [Plasma-Therm Blog](https://blog.plasmatherm.com) - [CONTACT US](https://corial.plasmatherm.com/en/contact-us) - Blank wrapper - [International Network](https://corial.plasmatherm.com/en/international-network) ## Your innovation is important. So is the right equipment. You have the vision.  You have your idea.  You can make a big impact. We are right there with you.  We too are innovators, creators, and designers.  Let's do this together! [LEARN MORE](https://corial.plasmatherm.com/en/about-corial/?hsLang=en) ## ![grey hands (1)](https://corial.plasmatherm.com/hs-fs/hubfs/grey%20hands%20(1).png?width=56&name=grey%20hands%20(1).png)Why we are trusted partners ## For more than 30 years we have been providing those in industry and academia with plasma etch and deposition systems. Our parent company, Plasma-Therm, is a global leader in the space, giving us access to world class resources and insights. With our team expertise and advanced equipment, we are the smart choice. [LEARN MORE](https://corial.plasmatherm.com/en/about-corial?hsLang=en) [![New call-to-action](https://no-cache.hubspot.com/cta/default/7547247/1746b90e-514e-4dea-87dd-2691bf55a921.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/1746b90e-514e-4dea-87dd-2691bf55a921) ##### Are we right for you? Follow these steps to find out. ##### 1. Share your project ##### 2. Answer our questions ##### 3. We create your solution   [![Let's Talk!](https://no-cache.hubspot.com/cta/default/7547247/20614af9-fbdd-4f19-9598-6ae531a980f9.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/20614af9-fbdd-4f19-9598-6ae531a980f9) ## Our know-how![Know How](https://corial.plasmatherm.com/hs-fs/hubfs/CORIAL_May_2020/images/picto-know-how-1.png?width=40&height=39&name=picto-know-how-1.png) Built on more than 30 years of combined experience and expertise, CORIAL is the technology leader driving innovation in plasma etch and deposition equipment for specialty semiconductor markets. [![Advanced Equipment](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/DMP3688.jpg "Advanced Equipment")](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/DMP3688.jpg?hsLang=en) ## Advanced Equipment We invest 15% of our revenues in R&D, in order to provide the most versatile, reliable, and highest-performing etch and deposition systems for specialty semiconductor markets. We deliver the only control software that broadens the process capabilities of conventional ICP tools to enable time-multiplexed processes such as the Bosch process, and Atomic Layer Etching (ALE). [LEARN MORE](https://corial.plasmatherm.com/en/products/etching-tools-and-deposition-tools/?hsLang=en) [![Team Experties](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/DMP3180.jpg "Team Experties")](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/DMP3180.jpg?hsLang=en) ## Team Experties Our engineers combine a thorough knowledge of plasma physics and chemistry with rigorous experimental design techniques (D.O.E.) to develop our products and processes. That technical expertise plus our distribution network enables CORIAL to offer a highly flexible suite of products with low cost of ownership. [LEARN MORE](https://corial.plasmatherm.com/en/meet-the-team?hsLang=en) [![Extensive Process Library](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/DMP3187.jpg "Extensive Process Library")](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/DMP3187.jpg?hsLang=en) ## Extensive Process Library At CORIAL, we address a range of end-market applications including MEMS, optoelectronics, failure analysis, power devices, advanced packaging, wireless devices and integrated optics. Our R&D team continuously develops and fine-tunes the etching and deposition processes that will enable our customers to structure the materials of today and tomorrow. [LEARN MORE](https://corial.plasmatherm.com/en/markets/specialty-semiconductor/?hsLang=en) ## CORIAL in brief![brief](https://corial.plasmatherm.com/hs-fs/hubfs/CORIAL_May_2020/images/picto-corial-en-brief-1.png?width=40&height=39&name=picto-corial-en-brief-1.png) 30 **years **of customer support in research institutes, universities, and fabs ![years of customer support](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/DMP3137-Recadre-BD-1.jpg "years of customer support") 9 specialty semiconductor **markets** served by our process solutions ![DMP3367 BD](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/DMP3367-BD.jpg "DMP3367 BD") ![technologies](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/technologies-e1488902900500.jpg "technologies") [Read more](https://corial.plasmatherm.com/en/blog/butterfly-project?hsLang=en) ## CORIAL participates in the EU funded BUTTERFLY Project! [![EU_Flag_TL_2](https://corial.plasmatherm.com/hubfs/EU_Flag_TL_2.png "EU_Flag_TL_2")](https://corial.plasmatherm.com/en/blog/butterfly-project?hsLang=en) ![Shutterstock](https://corial.plasmatherm.com/hubfs/CORIAL_May_2020/images/shutterstock_277806740-BD.jpg "Shutterstock") [Learn more](https://corial.plasmatherm.com/en/our-story?hsLang=en) ##### What do we do at CORIAL? ##### Watch this 2-minute video to see for yourself. [![quote>newsletter](https://no-cache.hubspot.com/cta/default/7547247/2be88541-9961-4fe9-b07c-314e5e653888.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/2be88541-9961-4fe9-b07c-314e5e653888) [![quote](https://no-cache.hubspot.com/cta/default/7547247/0ee740a6-9189-46b7-b114-011ce7f398c6.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/0ee740a6-9189-46b7-b114-011ce7f398c6) [![contact](https://no-cache.hubspot.com/cta/default/7547247/d30e55cc-6021-44b7-a53e-75407de513de.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/d30e55cc-6021-44b7-a53e-75407de513de) ![Corial](https://corial.plasmatherm.com/hubfs/raw_assets/public/CORIAL_May_2020/images/logo-white-1.png) - [ABOUT](https://corial.plasmatherm.com/en/about-corial) - [RESOURCES](https://corial.plasmatherm.com/resources) - [MARKETS](https://corial.plasmatherm.com/en/markets/specialty-semiconductor) - [TECHNOLOGIES](https://corial.plasmatherm.com/en/technologies/plasma-technologies) - [PRODUCTS](https://corial.plasmatherm.com/en/products/etching-tools-and-deposition-tools) - [SERVICES](https://corial.plasmatherm.com/en/services) - [BLOGS](https://corial.plasmatherm.com/en/blog) - [CONTACT US](https://corial.plasmatherm.com/en/contact-us) #### Follow us on - [LinkedIn](https://fr.linkedin.com/company/corial) - [Twitter](https://twitter.com/corial_company) - [Facebook](https://www.facebook.com/CORIALaplasmathermcompany) Copyright CORIAL 2023 – All rights reserved | [Legal information](https://corial.plasmatherm.com/en/about-corial/en/legal-information/?hsLang=en) | [Credits](https://corial.plasmatherm.com/en/about-corial/en/credits/?hsLang=en) - [![contact](https://no-cache.hubspot.com/cta/default/7547247/07a71f9a-0aeb-4a95-86c9-4a2dfd7285c2.png)](https://cta-redirect.hubspot.com/cta/redirect/7547247/07a71f9a-0aeb-4a95-86c9-4a2dfd7285c2) [![real time web analytics](https://c.statcounter.com/12554016/0/c7d47b53/1/)](https://statcounter.com/) ```json { "@context" : "https://schema.org", "@type" : "VideoObject", "caption" : { "@type" : "MediaObject", "contentUrl" : "https://corial.plasmatherm.com/media-transcripts/46057720412/en.vtt", "inLanguage" : "en", "name" : "en Captions" }, "contentUrl" : "https://7547247.fs1.hubspotusercontent-na1.net/hubfs/7547247/20630%2c%20Lead%20G2%2c%20Corial%2c%20Who%20We%20Are%2c%2090%2c%20V3.mp4", "dateModified" : "2025-12-30T19:23:30.766Z", "duration" : "PT1M39.52S", "height" : 360, "name" : "20630, Lead G2, Corial, Who We Are, 90, V3", "thumbnailUrl" : "https://7547247.fs1.hubspotusercontent-na1.net/hubfs/7547247/20630%2c%20Lead%20G2%2c%20Corial%2c%20Who%20We%20Are%2c%2090%2c%20V3.mp4/medium.jpg?t=1767122610766", "uploadDate" : "2021-04-28T18:17:21.760Z", "width" : 640 } ``` ```json { "@context" : "https://schema.org", "@type" : "VideoObject", "caption" : { "@type" : "MediaObject", "contentUrl" : "https://corial.plasmatherm.com/media-transcripts/46057720615/en.vtt", "inLanguage" : "en", "name" : "en Captions" }, "contentUrl" : "https://7547247.fs1.hubspotusercontent-na1.net/hubfs/7547247/20630%2c%20Lead%20G2%2c%20Corial%2c%20What%20We%20Do%2c%2090%2c%20V4.mp4", "dateModified" : "2025-12-30T19:23:15.617Z", "duration" : "PT1M46.667S", "height" : 360, "name" : "20630, Lead G2, Corial, What We Do, 90, V4", "thumbnailUrl" : "https://7547247.fs1.hubspotusercontent-na1.net/hubfs/7547247/20630%2c%20Lead%20G2%2c%20Corial%2c%20What%20We%20Do%2c%2090%2c%20V4.mp4/medium.jpg?t=1767122595617", "uploadDate" : "2021-04-28T18:19:02.908Z", "width" : 640 } ```